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Wafer holder
Rotating wafer holders, with or without
vacuum, are presented to hold wafers of up
to 12"
diameter.
Individual solutions are offered upon customer request. |
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Products
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Wafer |
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| Waferholder, turnable | 5" - 6" Wafer | for EK / SCAN 150 x 150 |
| Vacuum waferholder, turnable | 5" - 6" Wafer | for EK / SCAN 150 x 150 |
| Waferholder, turnable | 6" - 8" Wafer | for EK / SCAN 200 x 200 |
| Vacuum waferholder, turnable | 6" - 8" Wafer | for EK / SCAN 200 x 200 |
| Waferholder, turnable | 8" - 12" Wafer | for EK / SCAN 300 x 300 |
| Vacuum waferholder, turnable | 8" - 12" Wafer | for EK / SCAN 300 x 300 |
