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Märzhäuser Wetzlar has developed and introduced a scanning stage with high dynamics and utmost precision to meet the next-generation demands and requirements of the semiconductor industry.
The combination of self-adjusting air bearings and linear motor technology makes the compact construction wear-resistant and maintenance-free. The stage is therefore suitable for clean-room operation. New standards are set by a processing speed of less than 1 microns/second up to over 2 metres/second and an acceleration of up to 3 m/sec2.